JPH082999Y2 - スピンコート装置 - Google Patents

スピンコート装置

Info

Publication number
JPH082999Y2
JPH082999Y2 JP1989142873U JP14287389U JPH082999Y2 JP H082999 Y2 JPH082999 Y2 JP H082999Y2 JP 1989142873 U JP1989142873 U JP 1989142873U JP 14287389 U JP14287389 U JP 14287389U JP H082999 Y2 JPH082999 Y2 JP H082999Y2
Authority
JP
Japan
Prior art keywords
wafer
gas
spin coater
thin film
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989142873U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0381626U (en]
Inventor
繁樹 小野寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsumi Electric Co Ltd
Original Assignee
Mitsumi Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsumi Electric Co Ltd filed Critical Mitsumi Electric Co Ltd
Priority to JP1989142873U priority Critical patent/JPH082999Y2/ja
Publication of JPH0381626U publication Critical patent/JPH0381626U/ja
Application granted granted Critical
Publication of JPH082999Y2 publication Critical patent/JPH082999Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1989142873U 1989-12-11 1989-12-11 スピンコート装置 Expired - Lifetime JPH082999Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989142873U JPH082999Y2 (ja) 1989-12-11 1989-12-11 スピンコート装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989142873U JPH082999Y2 (ja) 1989-12-11 1989-12-11 スピンコート装置

Publications (2)

Publication Number Publication Date
JPH0381626U JPH0381626U (en]) 1991-08-21
JPH082999Y2 true JPH082999Y2 (ja) 1996-01-29

Family

ID=31689681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989142873U Expired - Lifetime JPH082999Y2 (ja) 1989-12-11 1989-12-11 スピンコート装置

Country Status (1)

Country Link
JP (1) JPH082999Y2 (en])

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143866A (ja) * 1982-02-17 1983-08-26 Dainippon Screen Mfg Co Ltd レジスト剤塗布装置
JPS62128539A (ja) * 1985-11-29 1987-06-10 Matsushita Electric Ind Co Ltd ウエハの搬送装置
JPS62198122A (ja) * 1986-02-26 1987-09-01 Hitachi Ltd 半導体処理装置
DE3719952A1 (de) * 1987-06-15 1988-12-29 Convac Gmbh Einrichtung zur behandlung von wafern bei der herstellung von halbleiterelementen
JPH061758B2 (ja) * 1987-08-24 1994-01-05 三菱電機株式会社 レジスト塗布装置

Also Published As

Publication number Publication date
JPH0381626U (en]) 1991-08-21

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